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吴涛
副教授、研究员、博导
博士毕业院校： 加州大学洛杉矶分校
电话： 021-20685357
办公室： 信息学院3-326
个人主页： https://small.shanghaitech.edu.cn/
专业方向：
单位：
所属课题组：
研究方向： 微纳机电系统MEMS，压电射频谐振器、超声换能器、磁电/声光传感器与微系统、脑机接口IC
招聘主页：https://small.shanghaitech.edu.cn/archives/262
简介
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主要岗位职责（A角）
兼任岗位职责（B角）
兼任岗位职业（C角）

吴涛，上海科技大学常任副教授、研究员、博导。 2007年本科毕业于浙江大学，2011年12月博士毕业于美国加州大学洛杉矶分校。吴博士毕业后曾供职于英特尔，负责先进CMOS制程下的金属与氧化物原子层沉积工艺；之后以博士后研究员身份加入斯坦福大学和美国东北大学，负责微型曲面图像传感器、近零功耗压电射频器件和传感系统的研发。吴博士于2017年7月加入上海科技大学，建立了上科大微系统与先进传感器实验室(SMALL)。

课题组科研方向包括微纳机电系统MEMS/NEMS，磁电/声学微纳器件，以及MEMS-CMOS集成微系统等，已经在包括(Nature) Microsystems & Nanoengineering， ACS Nano，IEEE Electron Device Letters，Nature Communication，Applied Physics Letter，Physical Review Letter，Journal of Microelectromechanical Systems， IEEE MEMS，TRANSDUCERS，SENSORS，ISCAS等国际著名期刊和会议上发表学术论文100余篇。吴博士长期受邀担任多种国际知名期刊和会议的审稿人，先后主持参与了多个国家自然科学基金、上海市科委、江苏省科技厅和企业科研项目。

欢迎对多学科交叉感兴趣的理工科背景学生加入。


MEMS/NEMS Transducers & Microsystem

Piezoelectric MEMS

Advanced Micro/Nano Fabrication


  • EE114/P Introduction to Embedded Systems 

  • MSE2504/2514 Micro/Nano-Processing Technology Lab 

  • EE224B/J Introduction to MEMS Design

  • EE224G Advanced Microsystem Design

  • ShanghaiTech SIST Curriculum and Teaching Committee (CTC)

  • ShanghaiTech SIST EHS Committee (EHS) 

  • ShanghaiTech SIST Resource Management Committee (RMC)

  • Shanghaitech Quantum Device Lab Committee

  • Shanghaitech Electronic Information Degree Committee

  • IEEE Senior Member, IEEE NTC TC, TPC for TRANSDUCERS, IUS, APCOT etc.

  • 1. Wang, Yiwei;Zhang, Lejia;Wang, Baosheng;Cai, Junxiang;Gu, Yuandong Alex;Lou, Liang;Wang, Xiong;Wu, Tao;#, Microwave-induced thermoacoustic imaging with a multi-cell AlScN piezoelectric micromachined ultrasonic transducer, APPLIED PHYSICS LETTERS, 27 Mar 2023, 122(13)
  • 2. Anming Gao;Jie Zou;Tao Wu;#, Narrowband Impedance Transformer With Extremely High Transformation Ratio of 200, IEEE ELECTRON DEVICE LETTERS, Nov 2019, 40(11):1820-1823
  • 3. Shuai Shao;Zhifang Luo;Yuan Lu;Andrea Mazzalai;Carlo Tosi;Tao Wu;#, Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines, IEEE ELECTRON DEVICE LETTERS, 01 Apr 2022, 43(4)
  • 4. Wang, Ji Qian;Zhang, Zi Dong;Yu, Si Yuan;Ge, Hao;Liu, Kang Fu;Wu, Tao;Sun, Xiao Chen;Liu, Le;Chen, Hua Yang;He, Cheng;Lu, Ming Hui;Chen, Yan Feng;#, Extended topological valley-locked surface acoustic waves, NATURE COMMUNICATIONS, 14 Mar 2022, 13(1)
  • 5. Luo, Zhifang;Shao, Shuai;Wu, Tao;#, Characterization of AlN and AlScN film ICP etching for micro/ nano fabrication, MICROELECTRONIC ENGINEERING, 15 Apr 2021, 242
  • 6. Kangfu Liu;Yaoqing Lu;Tao Wu;#, 7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator, IEEE ELECTRON DEVICE LETTERS, Feb 2023, 44(2)
  • 7. Shuai Shao;Zhifang Luo;Yuan Lu;Andrea Mazzalai;Carlo Tosi;Tao Wu;#, High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 01 Jun 2022, 31(3)
  • 8. Wang, Yuxi;Yadagiri, Karampuri;Wu, Peng;Wu, Tao;#, Temperature dependent magnetostatic and dynamic properties of soft magnetic FeGaB/Al2O3thin films for microwave applications, AIP ADVANCES, 01 Mar 2022, 12(3)
  • 9. Pan, Zhengqing;Li, Ruiqian;Gao, Tian;Wang, Zi;Shen, Siyuan;Liu, Ping;Wu, Tao;Yu, Jingyi;Li, Shiying;#, Onsite Non-Line-of-Sight Imaging via Online Calibration, IEEE PHOTONICS JOURNAL, 01 Oct 2022, 14(5)
  • 10. Jinbo Wu;Shibin Zhang;Liping Zhang;Hongyan Zhou;Pengcheng Zheng;Hulin Yao;Zhongxu Li;Kai Huang;Tao Wu;Xin Ou;#, Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates, IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, 01 Aug 2022, 69(8):1-1
  • 11. Nie, Ran;Shao, Shuai;Luo, Zhifang;Kang, Xiaoxu;Wu, Tao;#, Characterization of Ferroelectric Al0.7Sc0.3N Thin Film on Pt and Mo Electrodes, MICROMACHINES, Oct 2022, 13(10)
  • 12. Wu, Peng;Cai, Junxiang;Wang, Yuxi;Liang, Pengli;Wang, Yi;Yan, Jun;Wu, Tao;#, Elastocaloric-like effect in strain-mediated Mn3SnC/PZT magnetoelectric hetero-composite for solid-state refrigeration, ACTA MATERIALIA, 15 Sep 2022, 237
  • 13. Wang, Yiwei;Zhang, Lejia;Cai, Junxiang;Wang, Baosheng;Gu, Yuandong Alex;Lou, Liang;Wang, Xiong;Wu, Tao;#, Microwave-Induced Thermoacoustic Imaging Using Aluminum Nitride PMUT, INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC., 2023, 2023-January:413-416
  • 14. Zhengqing Pan;Ruiqian Li;Tian Gao;Zi Wang;Siyuan Shen;Ping Liu;Tao Wu;Jingyi Yu;Shiying Li;#, Onsite Non-Line-of-Sight Imaging via Online Calibrations, IEEE PHOTONICS JOURNAL, 19 Sep 2022, 14(5)
  • 15. Yaoqing Lu;Kangfu Liu;Yuxi Wang;Ran Nie;Tao Wu;#, LNOI Thin-Film Dual-Axis Resonant Micro-Mirror with E16 Torsional Actuation, INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS INC., 2023, 2023-January:669-672
  • 16. Junxiang Cai;Yiyun Wang;Daohuai Jiang;Yuandong Gu;Liang Lou;Fei Gao;Tao Wu;#, Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers, IEEE SENSORS LETTERS;, 2023, 7(4)
  • 17. Jinbo Wu;Shibin Zhang;Hongyan Zhou;Pengcheng Zheng;Liping Zhang;Zhongxu Li;Yuxi Wang;Tiangui You;Kai Huang;Tao Wu;Xin Ou;#, A New Class of High-Overtone Bulk Acoustic Resonators Using Lithium Niobate on Conductive Silicon Carbide, IEEE ELECTRON DEVICE LETTERS, Jul 2021, 42(7):1061-1064
  • 18. Jinbo Wu;Shibin Zhang;Yang Chen;Pengcheng Zheng;Liping Zhang;Hulin Yao;Zhongxu Li;Xiaomeng Zhao;Kai Huang;Tao Wu;Xin Ou;#, Advanced Surface Acoustic Wave Resonators on LiTaO3/SiO2/sapphire Substrate, IEEE ELECTRON DEVICE LETTERS, 01 Oct 2022, 43(10):1-1
  • 19. Shuai Shao;Zhifang Luo;Tao Wu;#, Electro-acoustic Phase Modulator based on AlScN Thin Film, IEEE ELECTRON DEVICE LETTERS, 20 Mar 2023, 44(5):817-820