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吴涛
副教授、研究员、博导
博士毕业院校： 加州大学洛杉矶分校
电话： 021-20685357
办公室： 信息学院3-326
个人主页： https://small.shanghaitech.edu.cn/
专业方向：
单位：
所属课题组：
研究方向： 微纳机电系统（MEMS/NEMS），压电器件与微系统（PiezoMEMS）、集成电路与AI辅助设计（AI4IC）
招聘主页：https://small.shanghaitech.edu.cn/archives/262
简介
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科研
教学
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主要岗位职责（A角）
兼任岗位职责（B角）
兼任岗位职业（C角）

吴涛，上海科技大学常任副教授、研究员、博导。 2007年本科毕业于浙江大学，2011年12月博士毕业于美国加州大学洛杉矶分校。吴博士毕业后曾供职于英特尔，负责先进CMOS原子层沉积工艺；以博士后研究员身份加入斯坦福大学和美国东北大学，负责微型曲面图像传感器、近零功耗压电射频器件和传感系统的研发。2017年7月加入上海科技大学，建立了上科大微系统与先进传感器实验室(SMALL)。

课题组科研方向包括微纳机电系统MEMS/NEMS，磁电/声学微纳器件，AI4IC，以及MEMS-CMOS集成微系统等，已经在包括(Nature) Microsystems & Nanoengineering，Advanced Science，Nature Communication，Chip，Nano Letter，IEEE Electron Device Letters，Applied Physics Letter，Physical Review Letter，Journal of Microelectromechanical Systems，IEEE MEMS，IUS，TRANSDUCERS，ICCAD，ISCAS等国际著名期刊和会议上发表学术论文100余篇。吴博士长期受邀担任多种国际知名期刊和会议的审稿人，先后主持和参与了国家自然科学基金、重点研发计划、科技攻关专项、上海市科委、江苏省科技厅和企业合作等多个科研项目。

欢迎对微纳技术与多学科交叉感兴趣的理工科背景学生加入。


MEMS/NEMS Transducers & Microsystem

Piezoelectric MEMS

Advanced Micro/Nano Fabrication


  • EE114/P Introduction to Embedded Systems 

  • MSE2504/2514 Micro/Nano-Processing Technology Lab 

  • EE224B/J Introduction to MEMS Design

  • EE224G Advanced Microsystem Design

  • ShanghaiTech SIST Curriculum and Teaching Committee (CTC)

  • ShanghaiTech SIST EHS Committee (EHS) 

  • ShanghaiTech SIST Resource Management Committee (RMC)

  • Shanghaitech Material Device Lab Committee

  • Shanghaitech Electronic Information Degree Committee

  • IEEE Senior Member, IEEE NTC TC, TPC for TRANSDUCERS, IEEE NEMS, IUS, APCOT etc.

  • 1. Shuai Shao;Zhifang Luo;Yuan Lu;Andrea Mazzalai;Carlo Tosi;Tao Wu;#, Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay Lines, IEEE ELECTRON DEVICE LETTERS, 01 Apr 2022, 43(4):647-650
  • 2. Wang, Ji Qian;Zhang, Zi Dong;Yu, Si Yuan;Ge, Hao;Liu, Kang Fu;Wu, Tao;Sun, Xiao Chen;Liu, Le;Chen, Hua Yang;He, Cheng;Lu, Ming Hui;Chen, Yan Feng;#, Extended topological valley-locked surface acoustic waves, NATURE COMMUNICATIONS, 14 Mar 2022, 13(1)
  • 3. Luo, Zhifang;Shao, Shuai;Liu, Kangfu;Lu, Yuan;Mazzalai, Andrea;Tosi, Carlo;Wu, Tao;#, Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·qm) over 146, APPLIED PHYSICS LETTERS, 25 Apr 2022, 120(17)
  • 4. Lu, Yaoqing;Liu, Kangfu;Wu, Tao;#, Dual-Axis MEMS Resonant Scanner Using 128(circle)Y Lithium Niobate Thin-Film, ACOUSTICS, Jun 2022, 4(2):313-328
  • 5. Cai, Junxiang;Wang, Yiyun;Jiang, Daohuai;Zhang, Songsong;Gu, Yuandong Alex;Lou, Liang;Gao, Fei;Wu, Tao;#, Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging, MICROSYSTEMS & NANOENGINEERING, Dec 2022, 8(1)
  • 6. Shao, Shuai;Luo, Zhifang;Liu, Kangfu;Wu, Tao;#, Lorentz-force gyrator based on AlScN piezoelectric thin film, APPLIED PHYSICS LETTERS, 21 Nov 2022, 121(21)
  • 7. Kangfu Liu;Yaoqing Lu;Tao Wu;#, 7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator, IEEE ELECTRON DEVICE LETTERS, 01 Feb 2023, 44(2):305-308
  • 8. Junxiang Cai;Yiyun Wang;Daohuai Jiang;Yuandong Gu;Liang Lou;Fei Gao;Tao Wu;#, Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers, IEEE SENSORS LETTERS;, Mar 2023, 7(4)
  • 9. Shuai Shao;Zhifang Luo;Tao Wu;#, Electro-acoustic Phase Modulator based on AlScN Thin Film, IEEE ELECTRON DEVICE LETTERS, 20 Mar 2023, 44(5):817-820
  • 10. Luo, Zhifang;Li, Dongxiao;Le, Xianhao;He, Tianyiyi;Shao, Shuai;Lv, Qiaoya;Liu, Zhaojun;Lee, Chengkuo;Wu, Tao;#, Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer, NANOSCALE, 30 May 2024, 16(21):10230-10238
  • 11. Bian, Kewei;Li, Zhenyu;Liu, Yushuai;Xu, Sumei;Zhao, Xingyan;Qiu, Yang;Dong, Yuan;Zhong, Qize;Wu, Tao;Zheng, Shaonan;Hu, Ting;#, Demonstration of acousto-optical modulation based on a thin-film AlScN photonic platform, PHOTONICS RESEARCH, 01 Jun 2024, 12(6):1138-1149
  • 12. Xu, Tianqi;Liu, Yushuai;Pu, Yuanmao;Yang, Yongxiang;Zhong, Qize;Zhao, Xingyan;Qiu, Yang;Dong, Yuan;Wu, Tao;Zheng, Shaonan;Hu, Ting;#, Silicon-integrated scandium-doped aluminum nitride electro-optic modulator, PHOTONICS RESEARCH, 01 Feb 2025, 13(2):477-487
  • 13. Yang Li;Jiawei Li;Tao Wu;#, Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 01 Apr 2025, 34(2):194-203
  • 14. Wenxin Sun;Xiao Kou;Jiuren Zhou;Siying Zheng;Jiawei Li;Danyang Yao;Bochang Li;Tao Wu;Yan Liu;Yue Hao;Genquan Han;#, AlScN Ferroelectric Diode Enabled CAM with 4F2 Cell Size and Low Thermal Budget (330 °C), IEEE ELECTRON DEVICE LETTERS, Apr 2025, PP(99):568-571
  • 15. Xiong, Ruihong;Xu, Xuankai;Liu, Yushuai;Du, Shihao;Jin, Lihui;Chen, Fang;Wu, Tao;#, A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity, MICROSYSTEMS & NANOENGINEERING, 05 Mar 2025, 11(1)
  • 16. Xuankai Xu;Yushuai Liu;Tao Wu;#, Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film, Journal of Microelectromechanical Systems, 01 Apr 2025, 34(2):110-112
  • 17. Li, Jiawei;Xu, Xuankai;Li, Yang;Wu, Tao;#, Electrically tunable GHz acoustic waveguide using Al 0.7 Sc 0.3 N thin film, APPLIED PHYSICS LETTERS, Mar 2025, 126(9)
  • 18. Huang, Weixiong;Xia, Lipeng;Li, Jiawei;Sun, Yuhan;Zhang, Aoxue;Zhang, Hong;Chang, Chang;Wang, Yuxi;Li, Wenzhen;Li, Yang;Xu, Xiaochuan;Wu, Tao;Zou, Yi;#, Acousto-Optic Modulation on Silicon-Aluminum Nitride Hybrid-Integrated Platform for Cryogenic Applications, NANO LETTERS, 20 Mar 2025, 25(13):5117-5123
  • 19. Tianyi Li;Zhexin Tang;Tao Wu;Bei Yu;Jingyi Yu;Hao Geng;#, LLM-SRAF: Sub-Resolution Assist Feature Generation Using Large Language Model, 2025 Design, Automation & Test in Europe Conference (DATE), 02 Apr 2025, 1-7
  • 20. Xu, Xuankai;Liu, Yushuai;Wu, Tao;#, Bidirectional Thermo-Acoustic Modulator Based on LiNbO 3 Thin Film, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 30 Jan 2025, 34(2):110-112
  • 21. Wenxin Sun;Xiao Kou;Jiuren Zhou;Siying Zheng;Jiawei Li;Danyang Yao;Bochang Li;Tao Wu;Yan Liu;Yue Hao;Genquan Han;#, AlScN Ferroelectric Diode Enabled CAM With 4F² Cell Size and Low Thermal Budget (330 °C), IEEE Electron Device Letters, 01 Apr 2025, 46(4):568-571
  • 22. Yiwen Wu;Yuyang Chen;Shuo Yin;Nan Wang;Tao Wu;Xuming He;Hao Geng;Jingyi Yu;#, LVM-MO: A Large Vision Model Pioneer on Full-Chip Mask Optimization, 2025 62nd ACM/IEEE Design Automation Conference (DAC), 25 Jun 2025, 1-7
  • 23. Xu, Xuankai;Li, Jiawei;Wang, Ruoyu;Xiong, Ruihong;Wang, Yiwei;Shen, Xiaoqin;Wu, Tao;#, Piezoelectric-Metal Phononic Crystal Enabling GHz Tunable Ultrahigh Q Quasi-BIC Mode, ADVANCED SCIENCE, 17 Oct 2025, 13(6)
  • 24. Jiang, Wenbing;Xu, Xuankai;Pan, Jiazhen;Sun, Hancong;Guo, Yu;Wang, Huabing;Zhou, Libing;Wu, Tao;#, Loss investigations of high-frequency lithium niobate Lamb wave resonators at ultralow temperatures, APPLIED PHYSICS LETTERS, 20 Oct 2025, 127(16)
  • 25. Anming Gao;Jie Zou;Tao Wu;#, Narrowband Impedance Transformer With Extremely High Transformation Ratio of 200, IEEE ELECTRON DEVICE LETTERS, Nov 2019, 40(11):1820-1823
  • 26. Luo, Zhifang;Shao, Shuai;Wu, Tao;#, Characterization of AlN and AlScN film ICP etching for micro/ nano fabrication, MICROELECTRONIC ENGINEERING, 15 Apr 2021, 242
  • 27. Shuai Shao;Zhifang Luo;Tao Wu;#, High Figure-of-Merit Lamb Wave Resonators Based on Al0.7Sc0.3N Thin Film, IEEE ELECTRON DEVICE LETTERS, Sep 2021, 42(9):1378-1381