Thin Film based PMUT and Applications

Speaker:  Junxiang Cai

Time:      13:00, Jan. 17

Location: SIST 3-201

Host:      Tao Wu 

Abstract:

Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) have undergone significant advancements in recent years, enhancing both their performance and range of applications in the biomedical ultrasound field. This paper provides a comprehensive review of the state-of-the-art in PMUT technologies, with a focus on their operational principles, microfabrication techniques, and applications in various biomedical imaging and therapeutic contexts. The discussion highlights the strengths and limitations of PMUT technologies compared to conventional bulk transducers, examines the trade-offs between these two micromachined transducer types, and evaluates their growing importance in modern medical diagnostics and therapeutic practices. By offering an in-depth analysis, this review aims to provide a clear and detailed overview of PMUT s, underscoring their potential to drive the development of next-generation biomedical ultrasound applications.

Bio:

Junxiang Cai received the B.S. degree in physics from Shanghai Ocean University, Shanghai, China, in 2020, where he is currently pursuing the Ph.D. degree in electrical engineering in Shanghaitech university. His research interests include the design and microfabrication techniques of piezoelectric microelectromechanical system (MEMS) resonators for RF and sensing applications