Piezoelectric MEMS Resonators for Liquid Phase Sensing Applications

Release Time:2021-09-16Number of visits:105

Speaker:     Dr. Abid Ali

Time:          Sept.22.2021 10:15-11:15

Location:    SIST 1A 200

Host:            Prof. Tao Wu

 

Abstract:

Biological sensing in the mechanical domain offers novel opportunities to measure cellular processes. Operating mechanical resonators in liquid environment for the detection of mass presents a challenge at least for electrical characterization. There are a number of applications in the automotive industry, cell biology, and food analysis where the devices are expected to be interfaced in liquid in order to monitor the properties of the liquid. Over the past few decades, remarkable progress has been made in various research aspects of RF Micro/Nano components including design, modeling, fabrication and characterization methods.In this talk, Novel in-plane contour modes of thin-film piezoelectric-on-silicon (TPoS) micromechanical resonators will be introduced in liquid phase resonance mass sensing applications. Finally, summarized the latest development and findings for liquid phase sensing applications.

 

Bio:

Dr. Abid Ali received the M.Sc. and M.Phil degrees in Electronics from Quaid-i-Azam University, Islamabad Pakistan in 2009 and 2013 respectively. He received his Ph.D. degree from Electrical Engineering at City University of Hong Kong in 2018. He had worked as principal Scientist at IntelliSense in 2019. He is currently working as a research Scientist with Nanchang Institute of Microsystem Tianjin University.  His research interests include RF MEMS resonator in viscous media and Bio MEMS, Sensors.