返回
吴涛
副教授、研究员、博导
博士毕业院校： 加州大学洛杉矶分校
电话： 021-20685357
办公室： 信息学院3-326
个人主页： https://small.shanghaitech.edu.cn/
专业方向：
单位：
所属课题组：
研究方向： 微纳机电系统MEMS，压电射频谐振器、超声换能器、磁电/声光传感器与微系统，AI4IC
招聘主页：https://small.shanghaitech.edu.cn/archives/262
简介
团队
科研
教学
服务
成果
论文
影集
报道
主要岗位职责（A角）
兼任岗位职责（B角）
兼任岗位职业（C角）

吴涛，上海科技大学常任副教授、研究员、博导。 2007年本科毕业于浙江大学，2011年12月博士毕业于美国加州大学洛杉矶分校。吴博士毕业后曾供职于英特尔，负责先进CMOS制程下的金属与氧化物原子层沉积工艺；之后以博士后研究员身份加入斯坦福大学和美国东北大学，负责微型曲面图像传感器、近零功耗压电射频器件和传感系统的研发。吴博士于2017年7月加入上海科技大学，建立了上科大微系统与先进传感器实验室(SMALL)。

课题组科研方向包括微纳机电系统MEMS/NEMS，磁电/声学微纳器件，以及MEMS-CMOS集成微系统等，已经在包括(Nature) Microsystems & Nanoengineering， ACS Nano，IEEE Electron Device Letters，Nature Communication，Applied Physics Letter，Physical Review Letter，Journal of Microelectromechanical Systems， IEEE MEMS，TRANSDUCERS，SENSORS，ISCAS等国际著名期刊和会议上发表学术论文100余篇。吴博士长期受邀担任多种国际知名期刊和会议的审稿人，先后主持和参与了多个国家自然科学基金、重点研发计划、科技攻关专项、上海市科委、江苏省科技厅和企业合作科研项目。

欢迎对多学科交叉感兴趣的理工科背景学生加入。


MEMS/NEMS Transducers & Microsystem

Piezoelectric MEMS

Advanced Micro/Nano Fabrication


  • EE114/P Introduction to Embedded Systems 

  • MSE2504/2514 Micro/Nano-Processing Technology Lab 

  • EE224B/J Introduction to MEMS Design

  • EE224G Advanced Microsystem Design

  • ShanghaiTech SIST Curriculum and Teaching Committee (CTC)

  • ShanghaiTech SIST EHS Committee (EHS) 

  • ShanghaiTech SIST Resource Management Committee (RMC)

  • Shanghaitech Material Device Lab Committee

  • Shanghaitech Electronic Information Degree Committee

  • IEEE Senior Member, IEEE NTC TC, TPC for TRANSDUCERS, IEEE NEMS, IUS, APCOT etc.

  • 1. Anming Gao;Jie Zou;Tao Wu;#, Narrowband Impedance Transformer With Extremely High Transformation Ratio of 200, IEEE ELECTRON DEVICE LETTERS, Nov 2019, 40(11):1820-1823
  • 2. Luo, Zhifang;Shao, Shuai;Wu, Tao;#, Characterization of AlN and AlScN film ICP etching for micro/ nano fabrication, MICROELECTRONIC ENGINEERING, 15 Apr 2021, 242
  • 3. Shuai Shao;Zhifang Luo;Tao Wu;#, High Figure-of-Merit Lamb Wave Resonators Based on Al0.7Sc0.3N Thin Film, IEEE ELECTRON DEVICE LETTERS, Sep 2021, 42(9):1378-1381
  • 4. Shuai Shao;Zhifang Luo;Yuan Lu;Andrea Mazzalai;Carlo Tosi;Tao Wu;#, Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay Lines, IEEE ELECTRON DEVICE LETTERS, 01 Apr 2022, 43(4)
  • 5. Wang, Ji Qian;Zhang, Zi Dong;Yu, Si Yuan;Ge, Hao;Liu, Kang Fu;Wu, Tao;Sun, Xiao Chen;Liu, Le;Chen, Hua Yang;He, Cheng;Lu, Ming Hui;Chen, Yan Feng;#, Extended topological valley-locked surface acoustic waves, NATURE COMMUNICATIONS, 14 Mar 2022, 13(1)
  • 6. Wang, Yuxi;Yadagiri, Karampuri;Wu, Peng;Wu, Tao;#, Temperature dependent magnetostatic and dynamic properties of soft magnetic FeGaB/Al2O3thin films for microwave applications, AIP ADVANCES, 01 Mar 2022, 12(3)
  • 7. Luo, Zhifang;Shao, Shuai;Liu, Kangfu;Lu, Yuan;Mazzalai, Andrea;Tosi, Carlo;Wu, Tao;#, Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·qm) over 146, APPLIED PHYSICS LETTERS, 25 Apr 2022, 120(17)
  • 8. Wu, Peng;Cai, Junxiang;Wang, Yuxi;Liang, Pengli;Wang, Yi;Yan, Jun;Wu, Tao;#, Elastocaloric-like effect in strain-mediated Mn3SnC/PZT magnetoelectric hetero-composite for solid-state refrigeration, ACTA MATERIALIA, 15 Sep 2022, 237
  • 9. Lu, Yaoqing;Liu, Kangfu;Wu, Tao;#, Dual-Axis MEMS Resonant Scanner Using 128(circle)Y Lithium Niobate Thin-Film, ACOUSTICS, Jun 2022, 4(2):313-328
  • 10. Cai, Junxiang;Wang, Yiyun;Jiang, Daohuai;Zhang, Songsong;Gu, Yuandong Alex;Lou, Liang;Gao, Fei;Wu, Tao;#, Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging, MICROSYSTEMS & NANOENGINEERING, Dec 2022, 8(1)
  • 11. Shao, Shuai;Luo, Zhifang;Liu, Kangfu;Wu, Tao;#, Lorentz-force gyrator based on AlScN piezoelectric thin film, APPLIED PHYSICS LETTERS, 21 Nov 2022, 121(21)
  • 12. Kangfu Liu;Yaoqing Lu;Tao Wu;#, 7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator, IEEE ELECTRON DEVICE LETTERS, 01 Feb 2023, 44(2)
  • 13. Domann, John;Wu, Tao;Chung, Tien-Kan;Carman, Greg;#, Strain-mediated magnetoelectric storage, transmission, and processing: Putting the squeeze on data, MRS BULLETIN, Nov 2018, 43(11):848-853
  • 14. Shuai Shao;Zhifang Luo;Tao Wu;#, Electro-acoustic Phase Modulator based on AlScN Thin Film, IEEE ELECTRON DEVICE LETTERS, 20 Mar 2023, 44(5):817-820
  • 15. Jinbo Wu;Shibin Zhang;Hulin Yao;Liping Zhang;Pengcheng Zheng;Xiaoli Fang;Yang Chen;Xiaomeng Zhao;Kai Huang;Tao Wu;Xin Ou;#, Non-zero Power Flow Angles in Surface Acoustic Wave Resonators for Transverse Mode Suppression, IEEE ELECTRON DEVICE LETTERS, May 2024, 45(5):881-884
  • 16. Du, Mingye;Huang, Feixuan;Li, Jiawei;Liu, Yushuai;Xu, Xuankai;Wang, Nan;Wu, Tao;#, Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film, APPLIED PHYSICS LETTERS, 06 May 2024, 124(19)
  • 17. Xu, Tianqi;Liu, Yushuai;Pu, Yuanmao;Yang, Yongxiang;Zhong, Qize;Zhao, Xingyan;Qiu, Yang;Dong, Yuan;Wu, Tao;Zheng, Shaonan;Hu, Ting;#, Silicon-integrated scandium-doped aluminum nitride electro-optic modulator, PHOTONICS RESEARCH, 01 Feb 2025, 13(2):477-487
  • 18. Yang Li;Jiawei Li;Tao Wu;#, Band Analysis of Acoustic Delay Lines Based on Single-Phase Unidirectional Transducers, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Apr 2025, 34(2):194-203
  • 19. Wenxin Sun;Xiao Kou;Jiuren Zhou;Siying Zheng;Jiawei Li;Danyang Yao;Bochang Li;Tao Wu;Yan Liu;Yue Hao;Genquan Han;#, AlScN Ferroelectric Diode Enabled CAM with 4F2 Cell Size and Low Thermal Budget (330 °C), IEEE ELECTRON DEVICE LETTERS, Apr 2025, 46(4):568-571
  • 20. Wu, Yiwen;Chen, Yuyang;Yin, Shuo;Wang, Nan;Wu, Tao;He, Xuming;Geng, Hao;Yu, JIngyi;#, LVM-MO: A Large Vision Model Pioneer on Full-Chip Mask Optimization, PROCEEDINGS - DESIGN AUTOMATION CONFERENCE, Sep 2025,
  • 21. Xuankai Xu;Yushuai Liu;Tao Wu;#, Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Apr 2025, 34(2):110-112
  • 22. Xiong, Ruihong;Xu, Xuankai;Liu, Yushuai;Du, Shihao;Jin, Lihui;Chen, Fang;Wu, Tao;#, A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity, MICROSYSTEMS & NANOENGINEERING, 05 Mar 2025, 11(1)
  • 23. Junxiang Cai;Yiwei Wang;Tao Wu;#, High-Order Piezoelectric Micromachined Ultrasonic Transducer With Piezoelectric Layer Trench for Ultrasound Imaging, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16 May 2025,
  • 24. Junxiang Cai;Yiwei Wang;Tao Wu;#, Piezoelectric Micromachined Ultrasonic Transducers for Imaging Application, IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, 2025,
  • 25. Huang, Weixiong;Xia, Lipeng;Li, Jiawei;Sun, Yuhan;Zhang, Aoxue;Zhang, Hong;Chang, Chang;Wang, Yuxi;Li, Wenzhen;Li, Yang;Xu, Xiaochuan;Wu, Tao;Zou, Yi;#, Acousto-Optic Modulation on Silicon-Aluminum Nitride Hybrid-Integrated Platform for Cryogenic Applications, NANO LETTERS, 20 Mar 2025, 25(13):5117-5123
  • 26. Li, Yang;Li, Jiawei;Wu, Tao;#, Tunable acoustic delay lines based on thermally controlled single-phase unidirectional transducers, APPLIED PHYSICS LETTERS, 21 Apr 2025, 126(16)
  • 27. Tianyi Li;Zhexin Tang;Tao Wu;Bei Yu;Jingyi Yu;Hao Geng;#, LLM-SRAF: Sub-Resolution Assist Feature Generation Using Large Language Model, 2025 DESIGN, AUTOMATION & TEST IN EUROPE CONFERENCE (DATE), 02 Apr 2025,
  • 28. Kewei Bian;Yushuai Liu;Weilin Rong;Yuan Dong;Qize Zhong;Yang Qiu;Xingyan Zhao;Tao Wu;Shaonan Zheng;Ting Hu;#, Acousto-Optic Modulation of a Microring Resonator on Thin-film AlScN Photonic Platform, IEEE PHOTONICS TECHNOLOGY LETTERS, 2025, PP(99):917-920
  • 29. Yushuai Liu;Xuankai Xu;Jiawei Li;Tao Wu;#, High Figure-of-Merit 36Y-cut LiNbO3 Lamb Wave Resonators with Dissipation Loss Optimization, IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, 2025, PP(99)
  • 30. Zihao Xie;Tao Wu;Jin Xie;#, Fast Dispersion Analysis and Parameter Extraction of SAW and Lamb-Wave Devices With Iterative HCT and Rational Approximation, IEEE TRANSACTIONS ON ELECTRON DEVICES, 2025, PP(99)