Tao Wu
Assistant Professor
Graduated School:Ph.D., University of California, Los Angeles, USA
Tel:(021) 20685357
Office:Room 3-326, SIST Building
Research Interests
Selected Publications


  • Multiferroic materials and transducers

  • Micro-/Nano-Electro-Mechanical system

  • Micro-/Nano-scale manufacturing and advanced semiconductor processing


Dr. Tao Wu is an assistant professor, PI in ShanghaiTech University, China. He received the B.S. degree from the Zhejiang University China in 2007 (with honors), and earned his M.S. and Ph.D degrees from University of California, Los Angeles in 2009 and 2011, respectively. After graduation, he worked as a Process TD Engineer in Intel Corp., focusing on high quality metal and low temperature oxide deposition using Atomic Layer Deposition (ALD). From 2014/08 to 2015/06, he was a Post-Doctoral Researcher in Prof. Roger T. Howe’s group, Stanford Universityand leading a Google ATAP funded monocentric imager project. After that, he worked as a Post-Doctoral Researcher in North eastern University leading a DARPA funded Nero-Zero sensor project using novel AlN resonator/switching techniquefor ultra-low power receiver application.  

He has published many papers on international conferences andjournals, including Nature Microsystems & Nanoengineering, ACS Nano, Applied Physics Letter, Journal of Applied Physics, Physical Review Letter,with a total citation over 1000 and H-index 17 (Google Scholar). He has alsoserved as a reviewer on over 20 journals and conferences.

Dr. Wu's research interests include novel multiferroic materials and transducers, Micro-/Nano-Electro-Mechanical system, Micro-/Nano-manufacturing and advanced semiconductor processing. He welcomes all science and engineering background tojoin his lab to explore fascinating micro/nano-technologies.




  1. A. Gao, K. Liu, J. Liang and T. Wu, “AlN MEMS filters with extremely high bandwidth widening capability”, (Nature Publishing Group) Microsystems & Nanoengineering, 6, 74, 2020.9, DOI: 10.1038/s41378-020-00183-5

  2. Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AlScN film ICP etching for micro/nano fabrication”, Microelectronic Engineering, 111530, 2021.2, DOI:10.1016/J.MEE.2021.111530.

  3. K.Yadagiri, T.Wu, “The thickness of buffer layer and temperature dependent magnetodynamic properties of Ta/FeGaB/Ta tri-layer”, J. Magn. Magn. Mater. Vol. 515, pp.167277, 2020.8, DOI: 10.1016/j.jmmm.2020.167277

  4. A. Gao, J. Zou and T. Wu, “Narrowband Impedance Transformer With Extremely High Transformation Ratio of 200,” in IEEE Electron Device Letters, vol. 40, no. 11, pp. 1820-1823, Nov. 2019.

  5. M. Li, C. Chen, R. Lu, Y. Yang, T. Wu and S. Gong, “Temperature Stability Analysis of Thin-Film Lithium Niobate SH0 Plate Wave Resonators”, Journal of Microelectromechanical Systems, vol. 28, no. 5, pp. 799-809, 2019.

  6. T. Wu, R. Lu, A. Gao, C. Tu, T. Manzaneque and S. Gong, “A chip-scale RF MEMS gyrator via hybridizing Lorentz-Force and Piezoelectric Transduction Mechanisms”, in Proceedings of IEEE International Conference on Micro-Electro-Mechanical-Systems (MEMS), Seoul, Korea, Jan. 2019.

  7. A. Emad, R. Lu, M.-H. Li, Y. Yang, T. Wu, and S. Gong, “Resonant torsional micro-actuators using thin-film lithium niobate”, in Proceedings of IEEE Micro-Electro-Mechanical-Systems (MEMS), Seoul, Korea, January 2019

  8. W. Z. Zhu, T. Wu, G. Chen, C. Cassella, M. Assylbekova, M. Rinaldi and N. McGruer, “Design and Fabrication of an Electrostatic AlN RF MEMS Switch for Near-Zero Power RF Wake-Up Receivers”, IEEE SENSORS JOURNAL, vol. 18, no. 24, pp. 9902-9909, December 2018.

  9. Li, Huaping, Zhou, Lili,and Wu, Tao, “Sodium dodecyl benzene sulfonate for single-walled carbon nanotubes separation in gel chromatography”, Diamond and Related Materials, vol. 88, pp. 189-192, 2018.

  10. Domann John, Wu Tao, Chung Tien-Kan and Carman Greg, “Strain-mediated magnetoelectric storage, transmission,and processing: Putting the squeeze on data”, Mrs Bulletin, vol. 43, no. 11, pp. 848-853, 2018

  11. Wu T., Qian Z. and Rinaldi M, “Low cost thin film encapsulation for AlN resonators”, In Proceedings of IEEE Micro Electro Mechanical Systems (MEMS), pp. 1024-1027, January 2018.

  12. T. Wu, G. Chen, C. Cassella, W. Z. Zhu, M. Assylbekova, M. Rinaldi, N. McGruer, “Design and Fabrication of AlN RF MEMS Switch for Near-Zero Power RF Wake-Up Receivers”, in Proceedings of IEEE Sensors 2017, Glasgow, October 29-November 2, 2017.

  13. T. Wu, G. Chen, Z. Qian, W. Zhu., M. Rinaldi and N. McGruer, “A Microelectromechanical Aln Resoswitch for RF Receiver Application”, in Proceedings of 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Kaohsiung, pp. 2123-2126, 2017.

  14. C. Cassella, G. Chen, T. Wu, Z. Qian and M. Rinaldi, “Low Impedance Array of Coupled CrossSectional Lame’ Mode Resonators with High Figure of Merit in Excess of 100”, in Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan, June 18-22, 2017.

  15. T. Wu, S. S. Hamann, A. Ceballos, C.E. Chang, O. Solgaard and R. T. Howe, “Design and Fabrication of Silicon Tessellated Structures for Monocentric Imagers”, (Nature Publishing Group) Microsystems & Nanoengineering, vol. 2, 16019, 2016.