Development and characterization of piezoelectric AlScN thin films for electroacoustic applications

Speak:     Dr. Yuan Lu

Time:       09:00-10:00, Nov. 18

Location:  SIST 1B-108

Host:       Prof. Tao Wu


The 5G mobile communication is nowadays a great technology innovation, to meet the requirement of higher data rate, a higher electromechanical coupling is needed. The piezoelectric coefficient and coupling is limited in the conventional AlN RF-devices, using AlScN the piezoelectric coefficient has up to 8x increase and thus the coupling is enhanced. In this seminar, we will focus on the synthesize of piezoelectric AlScN film for electroacoustic applications and fabrication of devices.


Dr. Yuan Lu received Master degree in Albrecht-Ludwig University of Freiburg in 2015. In 2015, he joined the Fraunhofer Institute for Applied Solid Physics and started the research on novel material in the next generation of RF applications. In 2019, he achieved his Dr.-Ing degree with Magna cum laude. After his PhD study, he joined the Evatec and is now in charge of the semiconductor sputtering technology in China region.

Sist seminar 18219