Tao Wu, Assistant Professor

Tao Wu, Assistant Professor

Tel:  (021) 20685357
Email: wutao@@shanghaitech.edu.cn
Office: Room 2-202D, SIST Building
Major: EE
Website: http://small.shanghaitech.edu.cn/
Tao Wu Research Group Recruitment (Click Here)


Multiferroic materials and transducers

Micro-/Nano-Electro-Mechanical system

Micro-/Nano-scale manufacturing and advanced semiconductor processing


Dr. Tao Wu is an assistant professor, PI in ShanghaiTech University, China. He received the B.S. degree from the Zhejiang University China in 2007 (with honors), and earned his M.S. and Ph.D degrees from University of California, Los Angeles in 2009 and 2011, respectively. After graduation, he worked as a Process TD Engineer in Intel Corp.(Hillsboro, OR), focusing on high quality metal and low temperature oxide deposition using Atomic Layer Deposition (ALD). From 2014/08 to 2015/06, he was a Post-Doctoral Researcher in Prof. Roger T. Howe’s group, Stanford Universityand leading a Google ATAP funded monocentric imager project. After that, he worked as a Post-Doctoral Researcher in North eastern University leading a DARPA funded Nero-Zero sensor project using novel AlN resonator/switching techniquefor ultra-low power receiver application.

He has published many papers on international conferences andjournals, including Nature Microsystems & Nanoengineering, ACS Nano, Applied Physics Letter, Journal of Applied Physics, Physical Review Letter,with a total citation over 1000 and H-index 17 (Google Scholar). He has alsoserved as a reviewer on over 20 journals and conferences.

Dr. Wu's research interests include novel multiferroic materials and transducers, Micro-/Nano-Electro-Mechanical system, Micro-/Nano-manufacturing and advanced semiconductor processing. He welcomes all science and engineering background tojoin his lab to explore fascinating micro/nano-technologies.


1.Li, Huaping, Zhou, Lili,and Wu, Tao.(2018).Sodium dodecyl benzene sulfonate for single-walled carbon nanotubes separation in gel chromatography.DIAMONDand RELATED MATERIALS,88,189-192.

2.Domann, John, Wu, Tao,Chung, Tien-Kan,and Carman, Greg.(2018).Strain-mediated magnetoelectric storage, transmission,and processing: Putting the squeeze on data.MRS BULLETIN,43(11),848-853.

3.Wu, T., Qian, Z., and Rinaldi, M. (2018, January). Low cost thin film encapsulation for AlN resonators. In Micro Electro Mechanical Systems (MEMS), 2018 IEEE (pp. 1024-1027). IEEE.

4.Zhu, W. Z., Wu, T., Chen, G., Cassella, C., Assylbekova, M., Rinaldi, M., and McGruer, N. (2018). Designand Fabrication of an Electrostatic AlN RF MEMS Switch for Near-Zero Power RF Wake-Up Receivers. IEEE Sensors Journal, 18(24), 9902-9909.

5.T. Wu, G. Chen, C. Cassella, W. Z. Zhu, M. Assylbekova, M. Rinaldi, N. McGruer,Design and Fabrication of AlN RF MEMS Switch for Near-Zero Power RF Wake-Up Receivers, IEEE Sensors 2017, Glasgow, Oct. 29-Nov. 2, 2017.

6.T. Wu, G. Chen, Z. Qian, W. Zhu., M. Rinaldi and N. McGruer, A MICROELECTROMECHANICAL ALN RESOSWITCH FOR RF RECEIVER APPLICATION, 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Kaohsiung, 2017, pp. 2123-2126.

7.C. Cassella, G. Chen, T. Wu, Z. Qian and M. Rinaldi, Low Impedance Array of Coupled CrossSectional Lame Mode Resonators with High Figure of Merit in Excess of 100, Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), June 18-22 2017, Kaohsiung, Taiwan

8.T. Wu, S. S. Hamann, A. Ceballos, C.E. Chang, O. Solgaard and R. T. Howe, Design and Fabrication Of Silicon Tessellated Structures For Monocentric Imagers, (Nature Publishing Group) Microsystems & Nanoengineering, (2016) 2, 16019