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Distinguished Adjunct Prof. Xinxin Li / 李昕欣 特聘教授

Tel:  (021) 62131794
Major: EE


  • Micro/Nano Sensors and actuators
  • Microsystem Technologies


Xinxin Li received the B.S. degree in semiconductor physics and devices from Tsinghua University, Beijing, China, in 1987, and the Ph.D. degree in microelectronics from Fudan University, Shanghai, China, in 1998. 
For a long period of time, his research interests have been in the fields of micro/nano sensors and MEMS/NEMS. He was a Research Engineer with Shenyang Institute of Instrumentation Technology, Shenyang, China, for five years. He was also with The Hong Kong University of Science and Technology, Kowloon, Hong Kong, as a Research Associate and with Nanyang Technological University, Singapore, as a Research Fellow. He then joined Tohoku University, Sendai, Japan, as a Lecturer (Center of Excellence Research Fellowship). Since 2001, he has been a Professor with the Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai. From 2007 he has been serving as the Director of the State Key Laboratory of Transducer Technology, China. He has invented more than 100 patents and published about 400 papers in refereed journals and conference proceedings (including more than 200 SCI papers). He is on the Editorial Board of Journal of Micromechanics and Microengineering, Scientific Reports, Microsystems and Nanoengineering, etc. Prof. Xinxin Li served as the Technical Program Committee member for IEEE MEMS 2008, 2011, 2017 and 2018, IEEE Sensors from 2002 to 2014. From 2014, he has been serving as an International Steering Committee member for the international conference of Transducers. 
Xinxin Li received Honors and Awards as:
2007 The Winner of National Distinguished Youth Science Foundation 
2000 “One-Hundred talent program” of Chinese Academy of Science (Grade A for final evaluation 2004)
2004 New Century Talents Project National Candidates 
2011 The Leading Talent in Shanghai 
2012 Second prize of the State Technological Invention Award (individual ranking the 3rd) 
2005 First prize of the Shanghai Municipal Science and Technology Progress Award (technological Invention, individual ranking the 1st) 
2009 PhD Advisor Award for National Top 100 Excellent Doctoral Dissertations


1. Xu, P. C.; Yu, H. T.; Li, X. X., Microgravimetric Analysis Method for Activation-Energy Extraction from Trace-Amount Molecule Adsorption. Analytical Chemistry 2016, 88, (9), 4903-4908.
2. Xu, T.; Xu, P.; Zheng, D.; Yu, H.; Li, X. X., Metal-organic Frameworks (MOFs) for Resonant-Gravimetric Detection of Trace-Level Xylene Molecules. Analytical Chemistry 2016, 88, 12234-12240.
3. Chen, F.; Li, X. X.; Kraft, M., Electromechanical Sigma-Delta Modulators (Sigma Delta M) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review. IEEE Sensors Journal 2016, 16, (17), 6476-6495.
4. Tang, Q. C.; He, Q. S.; Li, M. Y.; Dong, C.; Xu, D. C.; Li, X. X., Wireless Alarm Microsystem Self-Powered by Vibration- Threshold-Triggered Energy Harvester. IEEE Transactions on Industrial Electronics 2016, 63, (4), 2447-2456.
5. Yang, Q. Q.; Zhou, X. F.; Sobelman, G. E.; Li, X. X., Network-on-Chip for Turbo Decoders. IEEE Transactions on Very Large Scale Integration (Vlsi) Systems 2016, 24, (1), 338-342.
6. Yu, F.; Wang, J. C.; Xu, P. C.; Li, X. X., A Tri-Beam Dog-Bone Resonant Sensor With High-Q in Liquid for Disposable Test-Strip Detection of Analyte Droplet. IEEE Journal of Microelectromechanical Systems 2016, 25, (2), 244-251.
7. Yu, H. T.; Chen, Y.; Xu, P. C.; Xu, T. G.; Bao, Y. Y.; Li, X. X., ?-'Diving suit' for liquid-phase high-Q resonant detection. Lab on a Chip 2016, 16, (5), 902-910.
8. Chen, Y.; Xu, P.; Xu, T.; Zheng, D.; Li, X. X., ZnO-nanowire size effect induced ultra-high sensing response to ppb-level H 2 S. Sensors and Actuators B: Chemical 2017, 240, 264-272.
9. Jiachou Wang, Xinxin Li, Single-Side Fabrication of Multilevel 3-D Microstructures for Monolithic Dual Sensors, IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 24, NO. 3, JUNE 2015, pp.531-533.
10. Cong Xue, Chen Yang, Tiegang Xu, Jing Zhan and Xinxin Li, A wireless bio-sensing microfluidic chip based on resonating ‘μ-divers’, Lab on a Chip, 2015, 15, 2318–2326.
11. Pengcheng Xu, Shuanbao Guo, Haitao Yu, and Xinxin Li, Mesoporous Silica Nanoparticles (MSNs) for Detoxification of Hazardous Organophorous Chemicals, Small, 2014, Vol.10, No. 12, pp. 2404–2412.