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Micro Piezoelectric Energy Harvester Fabricated with PZT Thin-film Using Aerosol Deposition Method
Date: 2014/11/6             Browse: 508

Speaker: Wen-Jong Wu

Time: Nov. 6, 4:00-5:10pm

Location: Room 220, Building 8


Internet of Thing (IoT) devices has been recognized as next thing big in semiconductor industry. Before 2020, there will be billions of connected intelligent devices linked with internet and interact with internet of people. For mobile devices and IoT devices in remote area or installed in difficult to access locations, battery is usually the only solution to power this kind of devices. However, the service and matainanace costs for battery operated devices are usually high. Nevertheless, energy harvesting technologies to havest energy from ambient environment is therefore promising to replace batteries in these devices. The piezoelectric micro energy harvesters (PMEH) or so called MEMS generators which can scanvege power from ambient vibrations has been an important research topic in the past decade. With the advancement of PMEH and with the SOC (system on chip) or SIP (system in package) technologies, it is possible to see a self-powered IC (integrated circuit) in near future. The performance, including the output votlage and output power for PMEHs has been steadily improved in the last decade. With the high quality PZT (lead zirconate titanate) thinflrm deposited with a home-made aerosal deposition chamber and the stainless subtracted based micro fabrciation processes, high output power with highly reliable PMEHs has been successfully fabricated. The output power of a cantilever type bi-morph PMEHs with a dimension of 9×6 mm chip aera has been achieved 425μW under a 1g vibration level at 143.25Hz. In this presentation, the aerosal deposition method and the analysis of the PZT thin-films deposited will be detailed. The fabrication process and design consideration of using stainless steel substrates instead of conventional silicon substrates will also be presented. The failure modes of PMEHs under high vibration levels will also be discussed. A self-powered SSHI (synchoronized swichting on inductors) non-linear interafacing circuit has also been successfully integrated with the PMEH. The results and considerations of the non-linear interafcing circuit and PMEH integration will also be presented.


Wen-Jong Wu is currently Professor with Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei, Taiwan.  Wen-Jong Wu got his Ph.D degree in Institute of Applied Mechanics from National Taiwan University.  He joined Department of Engineering Science and Ocean Engineering, National Taiwan University as Assistant Professor since 2003, has been Associate Professor since 2010, and has been Professor since 2014.  From 2007 to 2008, he was with Department of Mechanical and Aerospace Engineering, Cornell University, NY USA as a visiting assistant professor.  He is currently associate editor of Smart Materials and Structures and International Journal of Distributed Sensor network. His research interests are in piezoelectric power transducer, vibration energy harvesting, wireless sensor networks, and flexible electronics.    

                                                        SIST-Seminar 14037